Optimal Feedback Control Method using Magnetic Force for Crystal Growth Dynamics
نویسنده
چکیده
This paper proposes the optimal feedback control method using magnetic force for crystal growth dynamics of semiconductor materials. The system model considered here is described by the continuity, momentum, energy, mass transport, and magnetic induction equations. Receding horizon control is a kind of optimal feedback control in which the control performance over a finite future is optimized with a performance index that has a moving initial time and terminal time. The objective of this study is to propose a receding horizon control method for crystal growth dynamics of semiconductor materials. Keywords-Optimal control, crystal growth, process control
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